▷Features

◼ Ready for diverse semiconductor applications

Reactor health state (RHS) monitoring, end-point detection, plasma diagnostics and process optimization

◼ Fast and sensitive mass spectrometric monitoring

TOF mass analyzer enables real-time monitoring all process species with isotopic mass resolution at sub-second refresh rates

◼ Large dynamic range

Simultaneous detection of all precursors, byproducts and trace species in semiconductor processes

◼ Robust and mobile

Rugged, flexible configuration allows precision in harsh environments and portability for non-invasive detection

◼ Long-term stability

Accurate and reproducible response

◼ Powerful software

Simple control interface with a fully documented API for system integration

◼ Background reduction with notch filter technology

Attenuate specific abundant species to control mass spectral interferences

◼ On Source : EI(Electron Ionization)

◼ Mass Resolution : maximum 8000(depending on models)

◼ Mass Range : 1000 Th

◼ Separation : Orthogonal extraction TOF

◼ Maximum Spectra Rate : 1000 Hz

▷Applications

Process gases for etching and deposition